Together they master the important key technologies and processes: Ion beam etching, electron beam evaporation and magnetron sputtering. This enables the Group to offer solutions for precise surface processing for applications ranging from simple optical requirements to high-precision optics, from micro- to macro-optics.
Two companies of the VON ARDENNE Group – VON ARDENNE GmbH and scia Systems GmbH – will be exhibiting at the Laser World of Photonics 2025 in Munich from June 24 to 27. Both offer a broad technology portfolio with ion beam and plasma processes and state-of-the-art systems for the precise coating and structuring of surfaces.
The applications for these technologies are manifold: highly reflective and anti-reflective coatings, shape error correction for X-ray and telescope mirrors, structuring of optical gratings for augmented reality (AR) glasses, interference layers for AR/VR/XR components, layers for head-up displays, filter layers for semiconductor electronics or the creation of microstructures for photonic integrated circuits (PICs).
VON ARDENNE presents high-precision coating systems for optical or semiconductor applications on substrates up to 300 millimeters wide
With the OPTA X platform, VON ARDENNE offers an industrial coating solution for sophisticated optical filters, dielectric mirrors, and metallic alternating layer systems of the highest precision on substrates of various sizes and geometries. The initial focus was on optical components with a diameter of up to 200 millimeters.
To meet the demand for precision optical coatings for larger components, such as those required in the areas of consumer electronics (AR/VR/XR), automotive (HUD, interior/display glass) or semiconductors (wafer level optics, filter-on-chip, photonics), VON ARDENNE now also offers the OPTA X for 300 mm coating width – the OPTA X 300. Upon customer request, it can also be equipped with an EFEM and FOUP port for semiconductor industry-compatible wafer handling.
Thanks to the advanced process technology of the OPTA X, extremely precise coating thicknesses can be achieved, typically with a deviation of less than ±0.25 %. Another special feature is that interference optical coatings deposited with this accuracy can be applied simultaneously to the front and back of the optical component. This significantly shortens the production time.
The OPTA X can be optimally integrated into industrial production processes. This is also due to the fact that it is equipped with an optical monitoring system for in-situ process monitoring and quality control. Furthermore, it features comprehensive software control and automation for continuous component placement.
At the Laser World of Photonics, VON ARDENNE will also provide information about other vacuum coating solutions for applications ranging from micro-optics to large telescopes.
scia Systems presents ion beam and plasma technologies for efficient and precise processing of photonic integrated circuits (PIC)
scia Systems GmbH, the technology leader for high-precision, complex ion beam and plasma process equipment in the microelectronics, MEMS and precision optics industries, will be presenting the latest process solutions for coating and structuring based on advanced ion beam and plasma technologies at Laser World of Photonics. The focus will be on the coating and form error correction of X-ray optics, the structuring of optical gratings for AR glasses and the creation of microstructures for photonic integrated circuits (PICs).
Innovations in PICs are fundamental to the advancement of quantum technology and have the potential to change our increasingly data-driven world immensely. The exponential growth in data traffic is being driven by megatrends such as the Internet of Things (IoT), 5G and cloud computing. Innovative solutions that improve bandwidth, efficiency and speed are therefore in demand. PICs are becoming increasingly important as they offer the ability to process and transmit data at optical speed while significantly reducing energy consumption compared to conventional electronic circuits.
The photonic components contained in PICs, such as waveguides, lasers, modulators and detectors, are designed to manipulate and transmit light signals. This enables fast data transmission and reduces signal loss over long distances.
One of the key processing technologies for the production of PICs is ion beam etching. It enables the production of three-dimensional optoelectronic microstructures for PICs, such as waveguides and other optical components with accuracies in the nanometer range.
Ion beam trimming is also used in the efficient manufacture of PICs. PICs consist of many active and passive optical layers. The respective layer thickness has a significant influence on the optical performance. Ion beam trimming is used to correct the layer thickness in the nanometer range. Among other things, this minimizes optical scattering and maintains phase coherence, which is crucial for the efficiency and stability of photonic components and ensures consistent and high-performance operation of the PIC component.
In addition, the surface of PIC devices can be polished using an ion beam. This improves micro-roughness, minimizes defects and thus increases the yield and reliability of the PIC elements.
scia Systems offers customized system solutions and manufacturing technologies for the processing of PICs. The scia Trim systems are ideally suited for the correction of layer thicknesses and the polishing of optical surfaces. The scia Mill systems are used for creating optical microstructures. Depending on the expansion stage, both system types are ideally suited for industrial volume production as well as for research and development and are used by customers in the precision optics industry.
The VON ARDENNE Group auf der Laser World of Photonics 2025
Date:
24 – 26 June 2025, 9 am – 5 pm
27 June 2025, 9 am – 4 pm
Location:
VON ARDENNE: booth B1.460
scia Systems: booth B1.432
About the companies of the VON ARDENNE Group
scia Systems GmbH
Founded in 2013, scia Systems specializes in thin-film process equipment based on complex ion beam and plasma technologies. The Chemnitz-based company develops and manufactures systems for coating, etching and cleaning processes with nanometer resolution. The systems are used worldwide in various high-tech sectors, including the microelectronics, MEMS and precision optics industries. Further information can be found on the company’s website at www.scia-systems.com.
Contact
scia Systems GmbH
Mandy Gebhardt
Phone: +49 371 33561 322
E-mail: m.gebhardt@scia-systems.com
VON ARDENNE develops and manufactures systems for the industrial vacuum coating of materials such as glass, wafers, metal strip or polymer films. Our customers use these materials to manufacture high-quality products such as solar cells, architectural glass, fuel cells or microelectronic components for sensors and optics.
With more than 60 years of experience in electron beam technology and 50 years of experience in magnetron sputtering, VON ARDENNE is a pioneer and world-leading supplier of equipment and technologies in PVD thin film and vacuum process technology. Further information can be found on the company’s website at http://www.vonardenne.com.
VON ARDENNE GmbH
Am Hahnweg 8
01328 Dresden
Telefon: +49 (351) 2637-300
Telefax: +49 (351) 2637-308
http://www.vonardenne.de
Marketing und Kommunikation
Telefon: +49 351 2637-9738
E-Mail: iser.falk@vonardenne.com
